Abstract
Chemical vapour deposited HfN can be utilised as a component of multilayer systems in protective coatings on cutting tools. In this study, related AlHfN coatings were synthesized through a reaction of metallic hafnium and aluminium with HCl gas forming gaseous HfCl4 and AlCl3, which were subsequently transported into a heated coating reactor. Via high temperatures and separately introduced NH3 and N2 as reaction gases, AlHfN coatings were deposited on hardmetal inserts. By varying the ratio between AlCl3 and HfCl4, compositionally different AlHfN coatings were examined. Additionally, surface morphology, composition as well as crystalline phases of the obtained coatings were analysed by scanning electron microscopy, energy dispersive X-ray spectroscopy and X-ray diffraction. Finally, the microstructure of the cross section of a coating was investigated via transmission electron microscopy. The observations revealed a great impact of the gas composition on the morphology and crystal structures of the coatings. Within the layer, the growth of columnar microstructures was detected. Additionally, the formation of an amorphous HfN intermediate layer between the substrate and the AlHfN with a thickness of approximately 2 nm was found.
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