Abstract
Summary In this chapter, the state of the art technology of high-frequency SAW devices using thin film diamond is described. For high-frequency operation, diamond thin films with high SAW velocities have been employed together with piezoelectric ZnO thin films for electromechanical coupling. In addition to advantages in high-frequency operation, the durability for extremely highpower application and a supreme temperature stability were confirmed. For practical devices, 1.8-4.0 GHz resonators and narrow-band filters have been commercialized with excellent properties obtained using diamond SAW devices in comparison with quartz SAW devices. In forthcoming communication systems with high frequencies and high bit rates, the demand for this new type of SAW device is increasing to meet the requirements for broad applications in both wireless and optical communications. Future developments will mainly focus on material systems such as LiNbO3, KnbO3 and other piezoelectric thinfilms on diamond which might improve high frequency and wide band filters even further for a large volume mobile market.
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