Abstract
Publisher Summary This Chapter discusses design considerations and reported performance of the analytical SR X-ray microprobes. In addition to the analytical X-ray microprobe, which mainly employs hard X-rays, there is great progress with soft-X-ray microscopes for the observation of biological sections. The chapter also presents the X-ray optical elements and their applicable energy ranges. For an analytical X-ray microprobe, both the spatial resolution and the sensitivity are important. Various combinations of SR X-ray microprobe and spectrochemical techniques is the powerful methods for the characterization of advanced materials whose function is strongly related to the chemical state of a local area in a material. The advantages of energy tunability are also discussed to point out the potential of X-ray spectrochemical analysis with an energy-tunable X-ray microprobe. Although XRF detection becomes advantageous with the X-ray microprobe, spectral distortions caused by self-absorption effects should be considered when the element of interest is a major component in a sample. A scanning X-ray microprobe can provide most X-ray analyses with spatial resolution.
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