Abstract
This chapter discusses various principles used by aberration-corrected instruments and the performance they should be able to attain. This chapter also provides various application examples from areas chapter consider especially promising, and discuss what may be next for aberration-corrected scanning transmission electron microscopy (STEM). Aberration correction has greatly improved the performance and the range of useful applications of STEMs. It is now possible to form atomic resolution images and spectra at primary energies as low as 60 keV. Electron probes can be produced that are smaller than the typical atom and yet contain enough current for rapid EELS analysis with sensitivity down to the single atom level. This is leading to a new range of applications for the STEM- electron energy-loss spectroscopy (EELS) technique, which may well begin to rival the sensitivity of the atom probe.
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