Abstract

The soaring popularity of miniature, flexible, portable, and wearable electronic gadgets has magnified the demand for microelectronic systems. Attributing to their excellent power density, compact size, and cycling stability, micro-supercapacitors (MSCs) have been proved as remarkable energy storage systems in the field of microelectronics. Nonetheless, the feeble energy density, intricacy in precise device designing, and high cost of MSCs are the major demerits in their real-time use. In this connection, various unique strategies are being adopted by research groups to eradicate the disadvantages of MSCs and improve their electrochemical performance and reliability. Based on device design, MSCs can be classified as single electrode MSC, parallel plate MSC and interdigitated MSC. Moreover, various fabrication methods such as photolithography, direct ink writing, 3D printing, ink printing, screen printing, laser printing, stamping, and plasma etching are adopted to design MSCs. Every element of an MSC that is, substrate, current collector, electrode, and electrolyte, are equally important to fulfill the required criteria to realize a highly efficient MSC. This chapter illustrates the fundamental constituents of MSCs, device designs, electrode materials and their synthesis methods, integrated designs, and true performance evaluation methods of various types of MSCs. Further, recent developments of several MSCs and their pros and cons are discussed. Finally, the future perspectives of MSCs in the platform of microelectronics are outlined.

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