Abstract
This chapter consists mainly of two parts: firstly, fundamentals of advanced surface engineering processes, with emphasis on the tool protection, which addresses two kinds of techniques—physical–chemical functionalization, including thermal and plasma nitriding and ion implantation; and coating techniques, including electrodeposition, chemical vapor deposition, and physical vapor deposition. The second part concerns applications of surface engineering processes in micro-manufacturing which is focused on three application cases: surface treatments for micro-cutting tools; antiadhesion and wear resistance coatings on micro-molding tools, and micro-forming tool fabrication using surface engineering processes.
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