Abstract

This chapter discusses the principle of the electron energy-loss spectroscopy (EELS) analysis, and the information obtained from the spectra. The applications of the EELS analysis to characterize an amorphous carbon material are also described. The EELS is an analysis of the distribution of the electron energy—emergent from a thin specimen due to the inelastic interactions. An EELS spectrum contains extensive information about the specimen atoms like—what they are chemically, their electronic structures, their bonding states, their nearest neighbor distributions, coordination numbers, dielectric constants, and the band gaps. These characteristics are observed in different energy regions depending on the energy lost. An EELS analysis was used to characterize a new form of the amorphous diamond, its sp3 fraction, band gap, inter-band transition, and the density of the state. This analysis showed that the amorphous diamond consists of almost 100%sp3-bonded carbon close to the crystalline diamond, as compared with other highly sp3-bonded amorphous carbons.

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