Chapter 13 - Electrochemical machining for microfabrication

Abstract

Product miniaturization is the key factor for success in the field of microelectro-mechanical system, optics, biomedical engineering, aerospace, automobile, and many others. One of the ways to achieve product miniaturization is microfabrication by micromachining. Micromachining can be broadly classified into two categories, namely tool based and beam based. Some of the tool-based micromachining techniques are micromilling, microdrilling, microturning, microelectro discharge machining, electrochemical micromachining (EMM), etc. Beam-based micromachining includes laser beam micromachining, electron beam micromachining, photo lithography, etc. EMM has emerged as one of the pivotal technologies in the fields of microfabrication and nanofabrication. The basic setup for EMM consists of pulsed DC voltage supplied to the electrodes; in this case, the workpiece and the tool. The reverse image of the tool profile is generated on the workpiece in this procedure. High material removal rate, greater control over the process, and flexibility of machine setup are some of the advantages that EMM offers. Even though the process offers so many diverse applications, it is limited by some inherent process flaws like formation of oxide layer, deposition of metal on tool, low machining time, etc. To overcome these limitations, many hybrid micromachining techniques have been developed with state-of-the-art process control scheme and advancement in microtool fabrication for EMM. Due to its flexibility and favorable conditions, EMM will lead other micromachining technologies in various industrial applications in the near future. This chapters aims to shed light on the various aspects of EMM.