Abstract
In this paper, the chaotic motion of micro-cantilever tip in AFM is considered. A disturbance observer based control approach is proposed. The proposed control approach is composed of state observer, disturbance observer and baseline controller. It is also relatively easy to be realized based on the measurable control input and system output signal. The developed control approach is able to suppress chaos even if uncertainties in system model as well as external disturbances exist. Numerical simulations confirm that the disturbance observer based control approach proposed in this paper is capable of eliminating chaotic phenomenon of micro-cantilever tip in AFM systems.
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