Changing pattern of N2 dissociation in N2–Ar RF plasma during E–H mode transition

Abstract

The behaviour of nitrogen plasma mixed with varying proportions of argon (10%–80%) is investigated under different RF discharge conditions. It is observed that at a relatively low RF power of 200 W (E-mode) the dissociation fraction (DF) of nitrogen increases with the growing concentration of argon, whereas the opposite happens for a higher RF power of 1000 W (H-mode), when the DF rapidly falls from a high value as the argon percentage starts to increase. This rising trend of DF closely follows the argon metastable fraction (MF) in the E-mode, and for the H-mode it is not followed until the argon percentage crosses the 20% mark. The electron density, temperature and electron energy probability function (EEPF) are obtained using a RF compensated Langmuir probe and to evaluate the vibrational and rotational temperatures, DF, MF etc, a separate optical emission spectroscopy technique is incorporated. At 5 × 10−3 mbar of working pressure and 10% argon content the EEPF profile reveals that the plasma changes from non-Maxwellian to Maxwellian as the RF power jumps from 200 W to 1000 W, and for a fixed RF power the high energy tail tends to move upwards with the gradual increment of argon. These observations are reverified theoretically by considering electron–electron collision frequency and electron bounce frequency as a function of electron temperature. Overall, all the major experimental phenomena in this study are explained in terms of EEPF profile, electron–electron collision effect, electron and gas temperature, electron density and argon metastable population.