Abstract
The effects induced by α-particles and laser beam irradiation in air atmosphere in uncured and cured bisbenzocyclobutene (BCB) 2μm thick films, spin-coated on glass/ITO surface have been investigated. α-Particle irradiation was done by means of a thin film 241Am source (Eα=5.486MeV), up to the total fluence of about 5×1010particles/cm2. Laser irradiation was performed by a Nd3+:YAG (λ=1.06μm) laser in the free generation and the Q-switch regime, using both focused and unfocused beams. Irradiation induced changes were investigated using Light and Atomic Force Microscopy (AFM), infrared (IR), Ultraviolet/visible (UV/vis) and Raman spectroscopy by inspecting several uncured and cured BCB films before and after irradiation. It has been found that both types of irradiation under investigated conditions have produced a novel phase in the material, which is not present either in the uncured or the cured BCB films. Possible implications of the observed effects on curing and degradation of BCB films have been discussed.
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