Abstract
The effect of ion bombardment on the chemical structure and optical properties of polyimide films was investigated. Oxygen and nitrogen ion beams with energies in the range of 0.5–1.0 keV and doses between 1.7×1015 and 8.2×1016 ions/cm2 were irradiated on the films, and in situ x-ray photoelectron spectroscopy (XPS) and spectral transmittance analyses were carried out. The in situ XPS analyses showed that the addition reaction of oxygen and nitrogen atoms and desorption of components caused chemical structural changes in ion-bombarded polyimides. The in situ spectral analyses showed that the spectral transmittances of films were decreased by ion bombardment.
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