Change Qualification Framework in Semiconductor Manufacturing

Abstract

Wafer fabrication (Wafer Fab) involves state-of-the-art, expensive, and highly complex processes, and only little is known about its change qualification, a process that follows a strict guideline to ensure that changes will affect neither the process flow nor the quality and reliability of the final saleable wafers. This paper proposes a five-stage change qualification framework in semiconductor manufacturing. We conceptualize our framework based on a stage-gate model and define suitable stages and gates for effective decision making. Afterward, we demonstrate its robustness via a case study, which provides an elaborate example that guided a requestor who successfully went through all stages of the change qualification process in reducing the occurrence of tool alarms. Our framework is proven to be complete and ready for deployment in the industry as a standard process flow in manufacturing technology management.