Abstract
This paper describes how the propagation characteristics of shear-horizontal (SH) type piezoelectric boundary acoustic waves (PBAWs) change with overlay and metallic grating materials. We theoretically investigated the PBAW characteristics for various combinations of the overlay and metallic grating materials, and attempted to validate the qualitative prediction previously discussed and find the possible best material combination. The results are in agreement with the qualitative prediction. That is, large electromechanical coupling factor K2 is obtained when materials having small mass densities ρ and materials having extremely large ρ shear modulus c 44 are chosen, respectively, for overlay and metallic grating. When YX-LiNbO 3 is assumed as a substrate, for example, the best choice seems SiO 2 and Au for overlay and metallic grating, respectively. Although metals with extremely large ρ and c 44 such as W and Ta offer large K2, they may not be acceptable for practical applications for their large electric resistivity.
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