Abstract
ABSTRACTThe Digital Micromirror Device™ (DMD™) developed at Texas Instruments is a spatial light modulator composed of 500,000 to 1.3 million movable micromachined aluminum mirrors. The DMD™ serves as the engine for the current generation of computer-driven slide and video projectors, and for next generation devices in digital television and movie projectors. The unique architecture and applications of the device present several packaging and test challenges. This paper provides a description of package humidity modeling and verification testing, as well as an overview of the automated optical testing and test equipment that have been developed to support manufacturing of the DMD™.
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