Challenges & Physical Insights Into the Design of Fin-Based SCRs and a Novel Fin-SCR for Efficient On-Chip ESD Protection

Abstract

This paper presents the detailed physical insights into the silicon-controlled rectifier (SCR) phenomena in planar equivalent Fin SCR devices. The complexity and roadblocks for SCR triggering in FinFET technology are explored. Implication of contact silicidation on Fin SCR turn- ON is discussed in detail. Device design approaches are discussed for efficient Fin-enabled SCRs. In this direction, a novel contact engineering scheme in Fin technology is disclosed for improved SCR action. Moreover, a novel Fin SCR is presented, which offers area-efficient electrostatic discharge current carrying capability.