Abstract
In this paper we report a MEMS flexible display device based on the color filter Fabry–Perot interferometer and fabricated on a transparent and flexible polyethylene naphthalate substrate. Targeting easy processing, fast evolution and reduced fabrication steps, inkjet printing is selected as a promising technology. CF4 plasma surface treatment parameters' influence has been investigated through a design of experiment protocol. Important contact angle increase has led to pattern resolution between 50 and 100 µm depending on solutions and substrate nature. Finally, the designed device presents three primary color pixels with satisfying color purity (CIE 1931 chromaticity diagram—red: x = 0.52, y = 0.36; blue: x = 0.13, y = 0.20; green: x = 0.25, y = 0.57).
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