CF<sub>4</sub>, CH<sub>4</sub>, Ar 혼합기체의 전자 평균에너지

Abstract

Energy Distribution Function in pure , and mixtures of and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for , and Ar, were used. The differences of the transport coefficients of electrons in , mixtures of and Ar, have been explained by the deduced energy distribution functions for electrons and the complete collision cross-sections for electrons. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in -Ar mixtures shows the Maxwellian distribution for energy. That is, has the symmetrical shape whose axis of symmetry is a most probably energy.