Abstract
A ceramic–ceramic actuator composed of two piezoelectric ceramic layers with opposite poling directions was developed. One layer of the actuator had a high coercive electric field (PZT (Pb(Zr,Ti)O3)‐I; Ec=1.1 kV/mm), while the other had a relatively low coercive electric field (PZT‐II; Ec=0.6 kV/mm). The actuator was fabricated by cofiring a green compact composed of the PZT‐I powder on top of the PZT‐II powder. When an electric field >1.1 kV/mm was applied to the sintered body, the whole specimen was poled in one direction. Subsequently, by applying a field between 0.6 and 1.1 kV/mm, only the PZT‐II layer was switched to the other direction. When an electric field was applied to this oppositely poled two‐layer specimen, one layer of the specimen expanded while the other layer shrank. As a result of these reverse dilations, the actuator was bent into a dome shape, yielding a large axial displacement at the center. The displacement of this actuator with dimensions of 20 mm (diameter) × 1 mm (thickness) was 16 μm at 0.9 kV/mm.
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