Abstract
A novel joining method for ceramic and metallic layers is proposed using laser drilling and surface tension driven liquid metal filling. A high intensity laser beam irradiated a 500 μm thick ceramic filter, and the irradiated laser drilled the ceramic layer. The pulsed or CW laser transmitted through the ceramic layer irradiated the bottom metallic layer; the molten metallic layer then filled the drilled ceramic holes by the capillary force between the liquid metal and ceramic layer. As process variables, average laser power, pulse duration, and the number of pulses were used. The scattering optical properties were also studied for both green and red lasers. There was no significant difference between the colors and the estimated extinction coefficients were −26.94 1/mm and −28.42 1/mm for the green and red lasers, respectively.
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