Abstract
Technical polycrystalline sintered Al 2O 3 (90%) substrates have been irradiated, in a vacuum chamber, at grazing incident angles (∼30°), with pulsed ArF ( λ=193 nm, hν=6.4 eV) excimer laser, at different fluences and numbers of pulses, to modify the structure and morphology of the surface. Vacuum, inert gas and oxygen atmospheres, at different substrate temperatures, ∼25°C and ∼700°C, have been used to study surface chemistry and morphology modifications induced by laser energy. Surface chemistry has been analysed by XPS spectroscopy. Morphological modifications have been studied by SEM/EDS microscopy. Changes in surface roughness have been quantified by a standard profilometer.
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