Abstract
Abstract Differential capacitor sensors with variable airgap geometry enable mechanical quantities to be measured at temperatures up to 900 °C. In this paper it will be shown that ceramics, preferably alumina, are multi-purpose materials for capacitive sensors. The descriptions of technological approaches concern laser machining, sputter coating and reaction soldering of alumina components, electrical connections and alumina in cables; new sensors for strain and displacement are given as examples.
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