Ceramic sensor technology for the measurement of mechanical quantities at high temperature

Abstract

Abstract Differential capacitor sensors with variable airgap geometry enable mechanical quantities to be measured at temperatures up to 900 °C. In this paper it will be shown that ceramics, preferably alumina, are multi-purpose materials for capacitive sensors. The descriptions of technological approaches concern laser machining, sputter coating and reaction soldering of alumina components, electrical connections and alumina in cables; new sensors for strain and displacement are given as examples.