Abstract
The gas permeability and pore sizes in membranes and porous materials from reaction-sintered silicon nitride (RSSN) are studied. The substrates for the RSSN membranes are highly porous (80% pores) silicon nitride with pores 50–80 μm in size and alumina-based ceramics with pores about 10 μm in diameter. Silicon powder with a specific surface of 1.4 g/cm2 is deposited onto the substrates in the form of an aqueous dispersion by various methods including filtering and sintered in nitrogen at 1300–1400°C. The main difficulty of the process is in preventing the formation of defects at the places where the largest channel pores reach the surface of the substrate. Membranes with 0.5 -1 μm pores can be obtained on both types of substrate after a single deposition.
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