Abstract
In this paper we report the potentials of laser chemical vapour deposition (laser-CVD) processes in the high-temperature corrosion protection field. Amorphous silica coatings are produced on metallic substrates by using an ArF excimer laser in parallel configuration to photolytically induce the reaction between SiH 4 and N 2O, using Ar as a buffer gas. It is shown that by tuning the laser beam to the substrate distance stoichiometric SiO 2 films are deposited with different physico-chemical properties, namely refractive index, density and elastic modulus as determined by ellipsometry, FTIR, mass-volume measurements, nanoindentation, SEM, EDAX and EMPA. Corrosion tests of coated and uncoated Incoloy 800H samples have demonstrated that these LCVD silica coatings significantly improve the resistance of the metallic substrates to corrosive attack in aggressive atmospheres, even when submitted to thermal cycling. No sign of coating spalling or cracking was observed after nearly 2000 hours of exposure to the high-temperature corrosion test.
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