Abstract
A semiconductor array pH image sensor consisting of four separated blocks was fabricated using charged coupled device (CCD) and complementary metal oxide semiconductor (CMOS) technologies. The sensing surface of one of the four blocks was Si3N4 and this block responded to H+. The surfaces of the other three blocks were respectively covered with cation sensitive membranes, which were separately printed with plasticized poly (vinyl chloride) solutions including Na+, K+, and Ca2+ ionophores by using an ink-jet printing method. In addition, each block of the image sensor with 128 × 128 pixels could have a calibration curve generated in each independent measurement condition. The present sensor could measure the concentration image of four kinds of ions (H+, K+, Na +, Ca2+) simultaneously at 8.3 frames per second (fps) in separated regions on a chip.
Highlights
Semiconductor ion sensors are suitable for visualizing local chemical species, because of the capabilities of miniaturization and integration of the sensing area
A high operation stability of the array image sensor is required. It is important for a reliable array image sensor to demonstrate the image consisting of whole pixels, which indicates the total quality of achievement of the image sensor
In order to increase the adhesion of the plasticized polyvinyl chloride (PVC) membrane on the chip, the ink-jet printing areas were pretreated with sodium hydroxide solution
Summary
Semiconductor ion sensors are suitable for visualizing local chemical species, because of the capabilities of miniaturization and integration of the sensing area. Many miniaturized sensing pixels based on ISFET were two-dimensionally lined up neatly as an array-imaging sensor [1,2,3,4,5], and a semiconductor-sensing device was two-dimensionally divided into many sensing areas by an addressable light such as LAPS [6,7,8,9,10]. The array image sensor requires a dense, reliable and scalable ISFET array that enables massive parallelism and high throughput [13]. A high operation stability of the array image sensor is required. It is important for a reliable array image sensor to demonstrate the image consisting of whole pixels, which indicates the total quality of achievement of the image sensor
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