Abstract
This paper deals with the origin of void defects in lead zirconale titanate (PZT) microstructure, appearing after top electrode postdeposition heat treatment. The process conditions of void apparition are especially investigated, as well as the consequences of these defects on capacitor’s electrical properties. We point out that structures presenting the biggest cavities exhibit the shortest time to breakdown (tbd). This result indicates that cavities might play an important role in PZT capacitor degradation mechanisms.
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