Cavitation in flow through a micro-orifice inside a silicon microchannel

Abstract

Hydrodynamic cavitation in flows through a micro-orifice entrenched in a microchannel has been detected and experimentally investigated. Microfabrication techniques have been employed to design and develop a microfluidic device containing an 11.5μm wide micro-orifice inside a 100.2μm wide and 101.3μm deep microchannel. The flow of de-ionized water through the micro-orifice reveals the presence of multifarious cavitating flow regimes. This investigation divulges both similarities and differences between cavitation in micro-orifices and cavitation in their macroscale counterparts. The low incipient cavitation number obtained from the current experiments suggests a dominant size scale effect. Choking cavitation is observed to be independent of any pressure or velocity scale effects. However, choking is significantly influenced by the small stream nuclei residence time at such scales. Flow rate choking leads to the establishment of a stationary cavity. Large flow and cavitation hysteresis have been detected at the microscale leading to very high desinent cavitation numbers. The rapid transition from incipient bubbles to choking cavitation and subsequent supercavitation suggests the presence of radically different flow patterns at the microscale. Supercavitation results in a thick cavity, which extends throughout the microchannel, and is encompassed by the liquid. Cavitation at the microscale is expected to considerably influence the design of innovative high-speed microfluidic systems.