Abstract
The potential of the cathodoluminescence (CL) technique in the SEM or STEM for the investigation of semiconducting materials and devices is based on the fact, that it enables the evaluation of inhomogeneities in electronic material properties on a micron scale. Full use of this potential can be only made, however, if the experimental setup is useful not only for the measurement of the integral (undispersed) CL but also for spectral, temporal and temperature-dependent analysis. These requirements are not met with commercial electron beam instruments and therefore suited equipment has to be provided and assembled by the user (for detailed information on the most advanced experimental arrangements see /1,2/).The three primary quantities then available for analysis are a) the CL intensity, b) the CL spectrum and c) the CL decay after pulse excitation, which will be dealt with in the same sequence.
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