Abstract
A new surface analysis system comprising by a reflection high-energy electron diffraction (RHEED) apparatus combined with a cathodoluminescence (CL) detector has been developed. In this method, the luminescence is mainly radiated from the region within a few tens of nanometers below the surface due to the very shallow penetration of the electron beam. This enhancement of surface sensitivity has been demonstrated using bare and Au-coated sapphire (0001) wafers. The CL spectra varied with changing Au thickness on the order of nm, as well as with changing incident angle.
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