Abstract
Abstract A purifier for electronic grade gases, which operates at room temperature, was developed at BOC Group Technical Center. The purifier can remove the low parts per million volume (ppmv) impurities, such as CO, H2, CO2, H2O and O2 from inert gases to below 0.1 ppmv levels. During the development stage, several supported metal catalysts were examined as candidates for the room temperature oxidation of CO and H2, in order to select the most effective and reliable materials. With supported Rh and Pt, the low reactant concentrations (
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
