Abstract
The properties of gas-sensitive field-effect devices with catalytic metal gates are described. We demonstrate especially how the selectivity of these sensors depends on parameters such as the choice of catalytic metal, the structure of the catalytic metal film and the operation temperature of the device. The sensitivity towards molecules like hydrogen, ammonia, ethanol and ethylene is demonstrated. The selectivity pattern of devices with catalytic metal gates is discussed in relation to the fabrication of multisensor arrays and the development of 'artificial olfactory senses'.
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