Catalytic etching of {100}-oriented diamond coating with Ni and Cu nanoparticles under hydrogen

Abstract

Nanopores formed in insulating solid state membrane is of great importance in many fields such as detection of DNA/RNA molecules in their internal environment, probing and manipulating biopolymers. Here, we present an effective and convenient method to form nanopores in diamond etched by self-assembled Ni or Cu nanoparticles in hydrogen atmosphere. With our method, homogeneous nanopores with lateral size in the range of [Formula: see text]–[Formula: see text] were created without using Reactive Ion Etching (RIE) process. In this work, the etching pits of Ni and Cu etched diamond were investigated, respectively. A novel step-like pattern of etching pits was observed on diamond etched by Ni. In order to study the etching process and figure out the etching mechanism of diamond, Scanning Electron Microscopy (SEM) was used to observe the etching morphology. Atomic Force Microscopy (AFM) and Laser Scanning Confocal Microscope (LSCM) were used to visualize the image of diamond etching pits and investigate the step-like pattern. A fixed step height was observed in each pit. Based on these observations and findings, a hypothesis is proposed, which can help to provide a new controllable etching method.