Abstract
Monolithically cascaded one-axis micromirrors driven by angular vertical combs are designed and fabricated. Using W-shape ray optics, we demonstrate two-axis scanning covering /spl plusmn/6.0/spl deg/ two-dimensional area at resonant modes: 7.5 kHz, /spl plusmn/17 V in fast-scanning mirror, 1.2 kHz, /spl plusmn/7 V in slow-scanning mirror.
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