Carrier profiling with fast Fourier transform scanning spreading resistance microscopy: A case study for Ge, GaAs, InGaAs, and InP

Abstract

Quantitative scanning spreading resistance microscopy is currently a powerful method for carrier profiling in scaled nanoelectronic devices. Faced with the further reduction of dimensions and increasing architecture complexity, a force modulation method was developed to address the challenges associated with parasitic series resistances. Called fast Fourier transform scanning spreading resistance microscopy, the method has been shown to increase dynamic range when profiling Si devices and retains the doping contrast even in the presence of a series resistance. In this work we systematically investigate the potential of fast Fourier transform scanning spreading resistance microscopy for Ge, GaAs, InP, and InGaAs, presenting a quantitative comparison with Si as well as a more in-depth understanding of the capabilities and limitations of the method. Our results show that both GaAs and InP greatly benefit, with a significantly larger dynamic range and the ability to filter undesired series resistances. Doping concentration contrast in the presence of a series resistance can also be maintained in Ge but with high noise. For InGaAs there are only minor benefits. These findings prove that fast Fourier transform scanning spreading resistance microscopy is a valuable extension to regular scanning spreading resistance microscopy for more accurate carrier profiling in Si and non-Si materials, especially in architectures where parasitic series resistances are present.