Abstract
Si3N4 particles with approximately spherical appearance, good dispersity, and homogeneous particle size distribution were successfully fabricated by a modified carbothermal method with the use of high-pressure N2 and composite additives CaF2 and Y2O3. The effects of parameters such as N2 gas pressure, additive, and temperature on the carbothermal reduction-nitridation (CRN) process were examined in detail. Based on extensive investigations, the mechanism of formation of Si3N4 particles was revealed. It was found that the process of nucleation and growth of Si3N4via the vapour-liquid-solid (V-L-S) mechanism under sufficient liquid encapsulation was essential for synthesising uniform particles with approximately spherical morphology and good dispersity. Because of the favourable morphology, the as-prepared Si3N4 particles exhibited great potential as thermally conductive fillers for next generation thermal interface materials.
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