Abstract

Recently infrared photodetectors based on low-dimensional semiconductors have developed rapidly. However, due to its poor light absorption and incompatibility with traditional silicon-based readout circuit processes, the sensitivity and integration of such photodetectors are limited. In this work, we proposes a 64 × 64 quantum dot short-wavelength infrared (SWIR) photodetector composed of carbon nanotube thin film transistor (CNT TFT) and silicon-based ROIC. CNT TFT's gate is constructed by PbS colloidal quantum dots (PbS CQDs) which improve the absorption rate of infrared light. The generated photovoltage is amplified and converted in situ by CNT TFT. Notably, under infrared radiation of 1300 nm, the noise equivalent current reach up to 1.25*10−13A/Hz1/2. At a drain-source bias (Vds)= -0.1 V. The device exhibits detectivity of 5.6*1013 Jones and a fast response of 0.57 ms. The silicon-based ROIC is implemented by CMOS 0.18um process, with a power supply voltage of 1.8 V. It mainly includes a programmable integrator, a sampling and holding circuit, and a 10bit/2.5 MHz successive approximation analog-to-digital converter (SAR ADC). The programmable integrator has four levels of integral gain to meet the application requirements of different infrared light intensities. The experiment results show that the imaging function of the overall photodetector is correct, laying the foundation for the development of carbon-silicon based heterojunction integrated photodetector in the future.

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