Abstract

In nuclear reaction experiments, the thin targets are required. In the present work, 30 thin 116Sn targets were prepared using physical vapor deposition technique (preferable for thin film fabrication) on carbon backing with usage efficiency of 98%. The carbon-backed thin target films along with the parting agents are deposited on the particular substrates using a diffusion pump based coating unit. The thicknesses of the targets were verified using α-energy loss and RBS technique and they were in good agreement with each other. The purity of the target, verified using RBS, EDS and XRD techniques, were also tested with confirmation.

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