Abstract
Carbon nanotubes (CNTs) were produced on silicon (Si) substrate prepared by Thermal-CVD method using C55H96O6 (Palm Oil) as a starting material. Catalyst has been prepared by dissolving Nickel (II) nitrate, Ni (NO3)2.6H2O and ethyl alcohol, C2H5OH. Before the deposition process, silicon was coated with Nickel using spin coater. Various parameters such as amount of catalyst, amount of palm oil, deposition time, deposition temperature, flow rate of gas and carrier gas have been studied. By using Thermal-CVD, samples were penetrated using NH3 (argon) gas at a temperature 700 - 900oC for catalyst and 450oC for palm oil. Surface morphology and uniformity of CNTs were characterized using FESEM at different deposition temperature. Chemical functional groups of CNTs were characterized using FTIR. The surface morphology and uniformity of CNTs are dependents on parameters used.
Published Version
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