Abstract
Decomposition products from sparked 2-C4F6(2-perfluorobutyne)-SF6 mixtures have been identified. These include the perfluorocarbons, CF4, C2F4, C2F6, C3F8, C4F8, C4F10, C5F12 and C6F14 and two isomers of S2C2F4. Saturated perfluorocarbon products are shown to increase in abundance with increasing concentration of SF6 in 2-C4F6 up to approximately 70% SF6 in 2-C4F6. The most abundant decomposition product, perfluoromethane (CF4), was measured quantitatively for varying concentrations of SF6 in 2-C4F6 and found to show a maximum for the (70%) SF6-(30%)2-C4F6 composition. The data suggest that the suppression of solid carbon deposits is effected by conversion of carbon to gaseous products (mostly saturated perfluorocarbons). Comparisons are made with sparked 2-C4F6-N2 mixtures which show no evidence of carbon inhibition. These results indicate that proper tailoring of SF6-perfluorocarbon mixtures can effectively inhibit carbon formation.
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