Abstract
Diamond films are typically produced by both plasma and thermally assisted CVD using methane as the carbon source in an excess of hydrogens. Although these films have been characterized using a wide variety of techniques, nuclear magnetic resonance (NMR) spectroscopy can yield valuable new information. Both hydrogen and carbon-13 NMR spectroscopy can be used to examine polycrystalline diamond films2, even those with a hydrogen content of < 1%. NMR, however, has not been used extensively to date.
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