Abstract
We propose a concept of a flexible sensor array using a novel capacitive force sensor not having a vulnerable electrode on the force applied site. It has a polymer domed structure inside which silicone oil is contained. When the force is applied, the oil is pushed into the surrounding thin channels, where the change in capacitance due to the inflowing dielectric oil is measured between two electrodes on the top and bottom surfaces of the channel. Since the channel does not have a directly applied external force to it, the electrodes do not suffer from damage problems. The change in capacitance was simulated using a simplified flow model. The first trial device of the sensing element has been fabricated. A sensitivity of 0.05 pF/gf was achieved.
Highlights
Tactile sensors deploying many capacitive force sensing elements on a flexible polymer substrate, e.g., polydimethylsiloxane (PDMS), have been researched to make them conform to the 3-D surface of robotic fingers, artificial limbs, etc. [1,2]
We propose a flexible capacitive force sensor with nonbreakable electrodes with regard to the applied force
The displacement of the channel height with respect to the applied force is simulated by finite element method (FEM), showing that the SU-8 structure is sufficient to sense the change in capacitance with a high S/N
Summary
Tactile sensors deploying many capacitive force sensing elements on a flexible polymer substrate, e.g., polydimethylsiloxane (PDMS), have been researched to make them conform to the 3-D surface of robotic fingers, artificial limbs, etc. [1,2]. [1,2] These sensors have a problem in that metallic electrodes formed on the polymer are possibly broken when it is subjected to large stress, especially when it is directly contacted with an object. One of the causes of breakage is that the adhesion of metal to polymer is essentially not very strong. Another cause is that mechanical properties such as Young’s. If the stress generated by an applied force is larger than the adhesion strength, the electrodes would break. Employing a feedback control system to regulate the gap length at the same value is one possible solution [3], it is complicated and expensive
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
