Capacitive Stretchable Strain Sensor With Low Hysteresis Based on Wavy-Shape Interdigitated Metal Electrodes

Abstract

In this work, a stretchable thin film capacitive strain sensor based on wavy-structured interdigitated metal electrodes is successfully demonstrated. Wavy-shape metal electrodes were patterned using bulk silicon micromachining, endowing the electrodes with high stretchability and reliability. The electrodes were also protected with a layer of parylene C to prevent damage during stretching and embedded in polydimethylsiloxane (PDMS) stretchable package layers. The interdigitated electrodes sitting on the wavy structures experienced a waving angle change under external strain resulting in capacitive change, which is the sensing mechanism of the wavy structured interdigitated capacitive strain sensor (WICSS). The sensitivity and stretchability of the WICSS is dependent on the design of interdigitated electrodes and the dimension of the wavy structures. The gauge factor (GF) of the WICSS was 0.27 at 25% strain. There was little hysteresis during the stretching and releasing process in the range of 25% strain. The sensing property remained stable within a 1000 cycling test. The applications of the high-performance WICSS are also demonstrated by detecting the motion of human fingers and wrists.