Capacitive Sensors with Hybrid Dielectric Structures and High Sensitivity over a Wide Pressure Range for Monitoring Biosignals

Abstract

Various dielectrics with porous structures or high dielectric constants have been designed to improve the sensitivity of capacitive pressure sensors (CPSs), but this strategy has only been effective for the low-pressure range. Here, a hierarchical gradient hybrid dielectric, composed of low-permittivity (low-k) polydimethylsiloxane (PDMS) foam with low Young's modulus (low-E) and high-permittivity (high-k) MWCNT/PDMS foam with high Young's modulus (high-E), is designed to develop a CPS for monitoring biosignals over a wide force range. The foam-like structure with hybrid permittivity (low-k + high-k) is facilitated to improve the sensitivity, while the hierarchical structure with gradient Young's modulus (low-E + high-E) contributes to broadening the pressure sensing range. With the hierarchical gradient hybrid structure, the flexible pressure sensor achieves an enhanced sensitivity of 2.155 kPa-1, a wide pressure range (up to 500 kPa), a minimum detection limit (50 Pa), and an excellent durability (>2500 cycles). As a demonstration, a venous thrombosis simulation and smart insole system are established to monitor venous blood clots and plantar pressures, respectively, which reveal potential applications in wearable medicine, sports health prediction, athlete training, and sports equipment design.