Abstract
Abstract Capacitive micromachined ultrasonic transducers (CMUTs) are dominant in generating and receiving acoustic signals. CMUT transmission efficiency solely depends upon the membrane material utilized. This work presents the structural examination of receiving and transmitting characteristics of CMUT with divergent membrane materials, namely Silicon (Si), Silicon Nitride ( Si 3 N 4 {\mathrm{Si}_{3}}{\text{N}_{4}} ), Indium Phosphide (InP), Zinc Oxide (ZnO), and Polysilicon (Poly-Si). The analysis includes the membrane deflection, pull-in voltage, output pressure, resonant frequency and capacitance modification with variable DC voltage. It has been found that InP gives the pull-in voltage comparable to Si in the receiving mode and have more transduction efficiency in transmitting mode. Effect of dimensions of CMUT on pull-in voltage and resonant frequency are also discussed. The major contribution lies in the analytical and estimation study of CMUT for appropriate membrane material selection meant for transmission and reception in the field of pressure sensing application.
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