Capacitive Micromachined Ultrasonic Transducer Array with Pencil Beam Shape and Wide Range Beam Steering

Abstract

Abstract A capacitive micromachined ultrasonic transducer (CMUT) array is designed as an alternative to conventional piezoelectric transducers. A thin silicon nitride membrane is suspended over a bottom electrode on a silicon wafer. In the immersion mode, the transducer cell shape and dimensions are optimized for an operating frequency of 10 MHz. We show that the proposed imager array can generate a pencil shape beam with a ∼1.5° half beam width, enhancing the detector resolution. A phased array technique is employed to excite multiple cells using time-delayed signals to steer the acoustic beam toward the object. This eliminates the need to mechanically move the detector, simplifying the transducer driving system. Moreover, unlike conventional transducers, the pencil beam can be effectively steered over a wide range of angles without producing grating lobes, which minimizes power loss in undesired directions. This can also improve the signal to noise ratio of the imager CMUT array.