Capacitive humidity sensor based on zirconium phosphate nanoplates film with wide sensing range and high response

Abstract

Humidity sensing material is a key component of humidity sensor. In this short communication, we synthesized zirconium phosphate (ZrP) nanoplates and investigated their capacitive humidity sensing performance. The results show that the ZrP humidity sensor exhibits a wide response range (10.9–91.5 % relative humidity (RH)), high response (2409 at 91.5 % RH), short recovery time (9 s), and good repeatability at the optimal working frequency of 100 Hz and room temperature of 25 °C. In addition, the humidity sensing mechanism of the ZrP humidity sensor is analyzed by combining the characterization, dielectric constant and impedance testing results.