Abstract
Touch Mode Capacitive Pressure Sensor (TMCPS) is very suitable for industrial applications where pressure sensing is necessary because of their linearity, mechanical robust nature and large overload protection from harsh industrial condition. This work proposes an introduction of a notch in the concave substrate for further improvement of the sensitivity of the sensor. Small deflection mode is utilized for the mathematical analysis of the design proposed and MATLAB is utilized for all the software simulations. The sensitivity of the proposed model is very high compared to other models with flat substrate. The analysis and simulation show significant increase in sensitivity in touch mode. The pressure at which the value of the capacitance saturates is also much higher than other proposed designs. The analysis of concave substrate Double Touch Mode Capacitive Pressure Sensor (DTMCPS) will helpful in designing new sensor for performance increase and evaluate the behaviour of it.
Highlights
In the past Decade, the capacitive pressure sensor has been manufactured and used for various applications for its better reliability, low power consumption, small size and ability to integrate along with the low cost of fabrication.The capacitive pressure sensor is primarily made of two parallel plates with one of them being movable and sensitive to pressure where else the other being fixed and is not sensitive to pressure
We propose double touch mode capacitive sensor with the substrate shape being concave and perform its theoretical modelling and simulation of C-P characteristics of the sensor
The work deals with an analysis and simulation for Double Touch Mode Capacitive Pressure Sensor (DTMCPS) with concave well substrate and circular diaphragm
Summary
In the past Decade, the capacitive pressure sensor has been manufactured and used for various applications for its better reliability, low power consumption, small size and ability to integrate along with the low cost of fabrication. When the pressure in the environment of the sensor increases the deviation in the diaphragm increases and so the capacitance of the sensor is increased and the basic analysis is presented in [1]. Changing the shape of substrate reduced the strain on the diaphragm, where else introduction of a notch increased the touch pressure point increased the sensitivity as presented in [10]. We propose double touch mode capacitive sensor with the substrate shape being concave and perform its theoretical modelling and simulation of C-P characteristics of the sensor. The capacitance of the proposed design will be higher than that of TMCPS since with introduction of the concave shape the surface area of the substrate is increased. Eq. E is Young’s Modulus and v is Poisson’s Ratio
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