Abstract
The nonlinear equations for the static deflections of the moving electrode due to the electrical fields between the electrodes in capacitance microphones are presented. These equations are valid for the historic method of constant bias voltage and the more recently developed polymer electret biasing. The equations were solved numerically for boundary conditions of circular and annular membranes. Because of the nonlinearity of the electrical attraction forces, certain values of the microphone parameters exist for which the deflections can become unstable. The results compare closely with past solutions and experimental deflection data obtained on constant bias voltage microphones using a laser interferometer.
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