Abstract
High temperature surface acoustic wave sensors based on radio frequency identification technology require adequate antennas of high efficiency and thermal stability for the signal transmission. Platinum is well known and frequently used as a material of choice for high temperature and harsh environment applications because of the high melting point and its chemical stability. Therefore, one way to realize high temperature stable antennas is the combination of a Pt metallization on an AlO substrate. As a cost-effective technique, the Pt film is deposited via electrochemical deposition. For this growth procedure, a pre-deposited metallization on the AlO layer is required. This paper analyzes the influence of various seed layers (Ta, Ti, W, Cr, Pt) on the morphology, stability and electrical properties of the electrochemically-grown Pt thick film after heat treatments up to 1000 C in air. We find an oxidation of all adhesion layers except for Pt, for which the best electrical properties were measured. Although significant areas of the films delaminate from the substrate, individual anchor structures retain a stable connection between the Pt layer and the rough AlO substrate.
Highlights
In recent years, there has been a growing development of Pt-based sensors [1,2,3], such as temperature sensors, chemical sensors [4] and biological sensors [5,6], because of the outstanding high temperature properties and corrosive resistance of this material
We find an oxidation of all adhesion layers except for Pt, for which the best electrical properties were measured
The application of surface acoustic wave (SAW) devices for high temperature sensing combined with radio frequency identification (RFID) has been demonstrated several times [1,8,9,10]
Summary
There has been a growing development of Pt-based sensors [1,2,3], such as temperature sensors, chemical sensors [4] and biological sensors [5,6], because of the outstanding high temperature properties and corrosive resistance of this material. One way to realize such sensors is the surface acoustic wave (SAW) technology, which has been used since more than 30 years for high precision frequency filters [7]. The application of SAW devices for high temperature sensing combined with radio frequency identification (RFID) has been demonstrated several times [1,8,9,10]. Such a passive sensor based on SAW technology is composed of a piezoelectric substrate with interdigital transducer electrodes connected to an antenna consisting of a structured metallization on an insulating substrate.
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