Abstract
SUMMARYFePd/PZT/FePd and FePd/PZT stacked‐layer magnetic sensors were studied. A magnetic field was applied to the longitudinal direction of the sensor to cause longitudinal stress magnetostrictively, producing a piezoelectric output voltage in the PZT layer. The prototype sensors were 15 mm long and 6 mm wide and the thicknesses of the FePd layer and PZT layer were 10 and 330 µm, respectively. The theoretical sensitivities of the FePd/PZT/FePd sensor and the FePd/PZT sensor using a simple cantilever model were calculated to be 0.29 and 0.15 mV/A/m, respectively. The measured sensitivities agreed reasonably well with the calculated ones. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(11): 8–15, 2013; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.11533
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